四(二甲基氨基)钛(IV)

四(二甲基氨基)钛(IV)

CAS号:3275-24-9
英文名:TETRAKIS(DIMETHYLAMINO)TITANIUM
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化合物简介
Tetrakis(dimethylamino)titanium (TDMAT) is a chemical compound. The compound is generally classified as a metalorganic species, meaning that its properties are strongly influenced by the organic ligands but the compound lacks metal-carbon bonds. It is used in chemical vapor deposition to prepare titanium nitride (TiN) surfaces and in atomic layer deposition as a titanium dioxide precursor. The prefix \"tetrakis\" refers the presence of four of the same ligand, in this case dimethylamides.
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