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四氟化钨

四氟化钨

CAS号:13766-47-7
英文名:Tungsten tetrafluoride
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化合物简介
Tungsten tetrafluoride is an inorganic compound with the formula WF4. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.
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