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十八烷基三氯硅烷

十八烷基三氯硅烷

CAS号:112-04-9
英文名:Octadecyltrichlorosilane
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化合物简介
Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.
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用途
制造硅酮的中间体。